Understanding Materials for Microelectronics Using Computer Simulation

 BCS-ME seminar at American University in Dubai

Speaker: Dr. Pete Ludovice

Date: 26 March 2008

Time: 07:00 pm

Venue: AUD Room 109

The polymeric materials used in photolithography in the microelectronics industry are quite complex. As such, the connection between their structure and properties is not always well understood. Even chemists have difficulty understanding such relationships, so it is not surprising that us engineers see these materials and magical mixtures based on little or no logical understanding of how the molecular structure is connected to the resulting properties. The use of computer simulation is helpful in understanding such structure-property relationships for both research and education. Following a brief introduction to materials simulation, specific examples will be used to illustrate how this technique is helpful in both research and education. These examples will include computer simulation of the new class of cyclic olefin polymers used as photo resist materials and how their structure drastically affects their usefulness in photolithography. Some recent simulations of ultra-thin polymer films, which are used extensively in the photolithography process will also be used to explain how properties of these films change as the thickness of these films changes. Pete Ludovice is an Associate Professor of Chemical & Biomolecular Engineering at the Georgia Institute of Technology in Atlanta, Georgia in the United States. After completing his Ph.D. in chemical engineering at M.I.T. he did post-graduate work in the molecular simulation of polymeric materials at IBM, the U.S. National Aeronautics and Space Administration, and the Swiss Federal Institute of Technology in Zurich Switzerland. After managing the polymer materials group for Molecular Simulations Inc. (now Accelrys Inc.) he joined the faculty at the Georgia Institute of Technology. His research interests focus on the use of computer simulations to understand the connection between structure and properties for synthetic and biological macromolecules. He is also involved in the development of new educational approaches and educational outreach to engage the public on topics of general interest in science. He is host of “Inside the Black Box” a weekly radio program on science and technology at WREK radio, at 91.1FM in Atlanta.

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